Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261050 | Method of manufacturing semiconductor device, and etching gas | Takaya ISHINO, Toshiyuki Sasaki, Hisashi Shimizu | 2025-03-25 |
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Korehito KATO, Yoshinao Takahashi, Yoshihiko Iketani | 2022-04-26 |