Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12410112 | Purification method for fluoroolefin having structure of =CF2 or =CHF, high-purity fluoroolefin, and production method therefor | Yuka Matsuta | 2025-09-09 |
| 11814561 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound having unsaturated bond and dry etching method using the same | Hisashi Shimizu | 2023-11-14 |
| 11814726 | Dry etching method or dry cleaning method | Yoshinao Takahashi, Katsuya Fukae | 2023-11-14 |
| 11795396 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound having unsaturated bond and dry etching method using the same | Hisashi Shimizu | 2023-10-24 |
| 11795397 | Dry etching gas composition comprising sulfur-containing fluorocarbon compound and dry etching method using the same | Hisashi Shimizu | 2023-10-24 |
| 11584989 | Dry etching method or dry cleaning method | Yoshinao Takahashi, Katsuya Fukae | 2023-02-21 |
| 11434565 | Cleaning method of semiconductor manufacturing device | Yoshinao Takahashi | 2022-09-06 |
| 11437244 | Dry etching gas composition and dry etching method | Yoshihiko Iketani, Yukinobu Shibusawa, Hisashi Shimizu | 2022-09-06 |
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Yoshinao Takahashi, Mitsuharu SHIMODA, Yoshihiko Iketani | 2022-04-26 |
| 11183393 | Atomic layer etching using acid halide | Katsuya Fukae, Yoshinao Takahashi | 2021-11-23 |
| 10899615 | Feeding process of chlorine fluoride | Yoshinao Takahashi, Yoshimasa SAKURAI, Hiroki Takizawa, Sho Kikuchi, Shinichi Kawaguchi +2 more | 2021-01-26 |
| 10629449 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Tetsuya FUKASAWA, Yoshihiko Iketani | 2020-04-21 |
| 10431472 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Tetsuya FUKASAWA, Yoshihiko Iketani | 2019-10-01 |
| 10287499 | Etching gas composition for silicon compound, and etching method | Yoshinao Takahashi | 2019-05-14 |