Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11542231 | Method of producing fluorine-containing sulfide compounds | Wataru Kashikura, Yuki Sato | 2023-01-03 |
| 11437244 | Dry etching gas composition and dry etching method | Korehito KATO, Yukinobu Shibusawa, Hisashi Shimizu | 2022-09-06 |
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Korehito KATO, Yoshinao Takahashi, Mitsuharu SHIMODA | 2022-04-26 |
| 11046629 | Method of producing compound having butadiene skeleton containing hydrogen and fluorine and/or chlorine | Wataru Kashikura, Ryo Kimura, Yukinobu Shibusawa | 2021-06-29 |
| 10899615 | Feeding process of chlorine fluoride | Yoshinao Takahashi, Korehito KATO, Yoshimasa SAKURAI, Hiroki Takizawa, Sho Kikuchi +2 more | 2021-01-26 |
| 10629449 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Korehito KATO, Tetsuya FUKASAWA | 2020-04-21 |
| 10431472 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Korehito KATO, Tetsuya FUKASAWA | 2019-10-01 |