Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629449 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Korehito KATO, Yoshihiko Iketani | 2020-04-21 |
| 10431472 | Gas composition for dry etching and dry etching method | Yoshinao Takahashi, Korehito KATO, Yoshihiko Iketani | 2019-10-01 |