Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277560 | CVD apparatus and method of cleaning the CVD apparatus | Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata +5 more | 2012-10-02 |
| 7919141 | Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles | Takashi Tanioka, Katsuya Fukae | 2011-04-05 |
| 7332628 | Process for producing carbonyl fluoride | Yuki Mitsui, Yutaka Ohira, Akira Sekiya | 2008-02-19 |
| 7322368 | Plasma cleaning gas and plasma cleaning method | Akira Sekiya, Yuki Mitsui, Yutaka Ohira | 2008-01-29 |
| 7138364 | Cleaning gas and etching gas | Yutaka Ohira, Yuki Mitsui, Akira Sekiya | 2006-11-21 |
| 6787053 | Cleaning gases and etching gases | Akira Sekiya, Yuki Mitsui, Ginjiro Tomizawa, Katsuya Fukae, Yutaka Ohira | 2004-09-07 |