Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277563 | Plasma processing method | Masamichi Sakaguchi, Yasuhiro Nishimori, Yutaka Kudou, Satoshi Une | 2012-10-02 |
| 8207066 | Dry etching method | Yoshiharu Inoue, Hiroaki Ishimura, Hitoshi Kobayashi, Toru Ito, Toshiaki Nishida | 2012-06-26 |
| 7909933 | Plasma processing method | Masamichi Sakaguchi, Yasuhiro Nishimori, Yutaka Kudou, Satoshi Une | 2011-03-22 |