Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532484 | Plasma processing apparatus and plasma processing method | Taku Iwase, Takao Arase, Hayato Watanabe, Masahito Mori | 2022-12-20 |
| 10157750 | Plasma processing method and plasma processing apparatus | Masahito Mori, Takao Arase, Taku Iwase | 2018-12-18 |
| 9905431 | Dry etching method | Masahito Mori, Takao Arase, Ryuta Machida | 2018-02-27 |