Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482435 | Plasma processing apparatus | Masatoshi KAWAKAMI, Tsutomu Nakamura, Hideki Kihara, Hiroho Kitada, Hidenobu Tanimura | 2022-10-25 |
| 10796890 | Plasma processing apparatus and sample stage thereof | Yutaka Ohmoto, Kazunori Nakamoto, Koji Nagai | 2020-10-06 |
| 10141165 | Plasma processing apparatus and sample stage thereof | Yutaka Ohmoto, Kazunori Nakamoto, Koji Nagai | 2018-11-27 |