Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482435 | Plasma processing apparatus | Masatoshi KAWAKAMI, Tsutomu Nakamura, Hideki Kihara, Hiroho Kitada, Hironori Kusumoto | 2022-10-25 |
| 9620399 | Load port | Minoru Soraoka, Shinji Yokoyama, Noriyoshi Toyoda | 2017-04-11 |
| D703160 | Grounded electrode for a plasma processing apparatus | — | 2014-04-22 |
| 8532818 | Vacuum chamber | Tomohiro Ohashi, Tsutomu Nakamura, Michiaki Kobayashi | 2013-09-10 |
| 8366370 | Vacuum processing apparatus | Tsutomu Nakamura, Yuya Mizobe | 2013-02-05 |