| 6036816 |
Apparatus for processing a sample having a metal laminate |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
2000-03-14 |
| 5952245 |
Method for processing samples |
Yoshimi Torii, Kazuo Nojiri, Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama |
1999-09-14 |
| 5900162 |
Plasma etching method and apparatus |
Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama |
1999-05-04 |
| 5868854 |
Method and apparatus for processing samples |
Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more |
1999-02-09 |
| 5861601 |
Microwave plasma processing apparatus and method |
Yoshiaki Sato, Mitsuru Katamoto, Minoru Soraoka, Tsuyoshi Umemoto, Hideki Kihara +3 more |
1999-01-19 |
| 5770100 |
Method of treating samples |
Ryooji Fukuyama, Makoto Nawata, Yutaka Kakehi, Yoshiaki Sato, Yoshimi Torii +2 more |
1998-06-23 |
| 5556714 |
Method of treating samples |
Ryooji Fukuyama, Makoto Nawata, Yutaka Kakehi, Yoshiaki Sato, Yoshimi Torii +2 more |
1996-09-17 |
| 5380397 |
Method of treating samples |
Ryooji Fukuyama, Makoto Nawata, Yutaka Kakehi, Yoshiaki Sato, Yoshimi Torii +2 more |
1995-01-10 |
| 5320707 |
Dry etching method |
Tadamitsu Kanekiyo, Yoshiaki Sato, Kotaro Fujimoto |
1994-06-14 |
| 5200017 |
Sample processing method and apparatus |
Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama, Kazuo Nojiri, Yoshimi Torii |
1993-04-06 |
| 5110408 |
Process for etching |
Takashi Fujii, Kazuo Takata, Masaharu Nishiumi, Noriaki Yamamoto |
1992-05-05 |
| 5007981 |
Method of removing residual corrosive compounds by plasma etching followed by washing |
Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama, Kazuo Nojiri, Yoshimi Torii |
1991-04-16 |
| 4985113 |
Sample treating method and apparatus |
Kotaro Fujimoto, Yoshie Tanaka, Yoshiaki Sato |
1991-01-15 |
| 4795529 |
Plasma treating method and apparatus therefor |
Yoshinao Kawasaki, Yutaka Kakehi, Kado Hirobe, Katsuyoshi Kudo |
1989-01-03 |