Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5861601 | Microwave plasma processing apparatus and method | Yoshiaki Sato, Hironobu Kawahara, Minoru Soraoka, Tsuyoshi Umemoto, Hideki Kihara +3 more | 1999-01-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5861601 | Microwave plasma processing apparatus and method | Yoshiaki Sato, Hironobu Kawahara, Minoru Soraoka, Tsuyoshi Umemoto, Hideki Kihara +3 more | 1999-01-19 |