HS

Hiroji Saida

HI Hitachi: 2 patents #13,388 of 28,497Top 50%
Overall (All Time): #2,357,041 of 4,157,543Top 60%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
4462863 Microwave plasma etching Shigeru Nishimatsu, Keizo Suzuki, Ken Ninomiya, Ichiro Kanomata, Sadayuki Okudaira 1984-07-31
4436581 Uniform etching of silicon (doped and undoped) utilizing ions Sadayuki Okudaira, Yoshio Sakai, Shigeru Nishimatsu, Keizo Suzuki 1984-03-13