Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11574814 | Substrate and substrate processing method | Masahiro Tabata | 2023-02-07 |
| 11251049 | Etching method and plasma processing apparatus | Taku Gohira | 2022-02-15 |
| 10143436 | Particle therapy system | Arao Nishimura, Koji Matsuda, Ryosuke Shinagawa, Taisuke Takayanagi, Takao Kidani +3 more | 2018-12-04 |
| 9502282 | Method of semiconductor manufacture utilizing layer arrangement to improve autofocus | Takuya Hagiwara, Tatsunori Murata | 2016-11-22 |
| 9415241 | Charged particle beam irradiation system | Yuki Ito, Koji Matsuda, Ryosuke Shinagawa, Arao Nishimura | 2016-08-16 |
| 9188685 | Calibration method for radiation detector, and particle therapy system | Taisuke Takayanagi, Hideaki Nishiuchi, Yusuke FUJII, Takeji Sakae, Toshiyuki Terunuma | 2015-11-17 |
| 9162081 | Beam monitor system and particle beam irradiation system | Yoshihito Hori, Takayoshi Matsushita, Kunio Moriyama | 2015-10-20 |
| 9044605 | Beam monitor system and particle beam irradiation system | Yoshihito Hori, Kunio Moriyama, Tomohisa Iwamoto | 2015-06-02 |
| 8874385 | Radiation detector and verification technique of positioning accuracy for radiation detector | Taisuke Takayanagi, Hideaki Nihongi, Yusuke FUJII, Hiroshi Akiyama, Rintaro Fujimoto | 2014-10-28 |
| 8684151 | Raw material loading apparatus and pipe unit for raw material loading apparatus | Takaya Nakamura | 2014-04-01 |
| 8674319 | Beam monitor system and particle beam irradiation system | Tomohisa Iwamoto, Yoshihito Hori, Takayoshi Matsushita, Kunio Moriyama | 2014-03-18 |
| 8253113 | Charged particle beam irradiation system and charged particle beam extraction method | Hideaki Nishiuchi, Kazuyoshi Saito, Hiroshi Akiyama, Kazuo Hiramoto | 2012-08-28 |
| 8092703 | Manufacturing method of semiconductor device | Takeo Ishibashi, Kazumasa Yonekura, Kazunori Yoshikawa, Yoshiharu Ono | 2012-01-10 |
| 7985678 | Method of manufacturing a semiconductor integrated circuit device | Hiraku Chakihara, Mitsuhiro Noguchi, Naonori Wada, Akio Nishida | 2011-07-26 |
| 7833905 | Method of manufacturing a semiconductor integrated circuit device | Hiraku Chakihara, Mitsuhiro Noguchi, Naonori Wada, Akio Nishida | 2010-11-16 |
| 7692168 | Device and method for outputting charged particle beam | Kunio Moriyama, Noriaki Ouchi, Hisataka Fujimaki | 2010-04-06 |
| 7595266 | Method of manufacturing a semiconductor integrated circuit device | Hiraku Chakihara, Mitsuhiro Noguchi, Naonori Wada, Akio Nishida | 2009-09-29 |
| 7485477 | Thin plate manufacturing method and thin plate manufacturing apparatus | Shuji Goma, Hirozumi Gokaku, Kozaburo Yano, Yasuhiro Nakai | 2009-02-03 |
| 7402475 | Method of manufacturing a semiconductor integrated circuit device | Hiraku Chakihara, Mitsuhiro Noguchi, Naonori Wada, Akio Nishida | 2008-07-22 |
| 7375037 | Fabrication method for semiconductor integrated circuit device | Kazuo Yamazaki, Shinji Kuniyoshi, Kousuke Kusakari, Takenobu Ikeda | 2008-05-20 |
| 7247869 | Particle therapy system | Shunji Kakiuchi, Hiroshi Akiyama, Mamoru Katane, Koji Matsuda | 2007-07-24 |
| 7186578 | Thin sheet production method and thin sheet production device | Shuji Goma, Hirozumi Gokaku, Toshiaki Nagai, Kozaburo Yano, Yasuhiro Nakai | 2007-03-06 |
| 7154108 | Particle therapy system | Shunji Kakiuchi, Hiroshi Akiyama, Mamoru Katane, Koji Matsuda | 2006-12-26 |
| 7109126 | Method of manufacturing a semiconductor integrated circuit device | Hiraku Chakihara, Mitsuhiro Noguchi, Naonori Wada, Akio Nishida | 2006-09-19 |
| 6838388 | Fabrication method of semiconductor integrated circuit device | Masahiro Shioya, Masayuki Kojima, Takenobu Ikeda | 2005-01-04 |