Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4985114 | Dry etching by alternately etching and depositing | Sadayuki Okudaira, Hiroshi Kawakami, Tokuo Kure, Shinichi Tachi | 1991-01-15 |
| 4956043 | Dry etching apparatus | Masafumi Kanetomo, Shinichi Tachi, Kiichiro Mukai, Takahiro Daikoku, Shigekazu Kieda +2 more | 1990-09-11 |
| 4943344 | Etching method | Shinichi Tachi, Sadayuki Okudaira, Kiichiro Mukai | 1990-07-24 |
| 4911812 | Plasma treating method and apparatus therefor | Katsuyoshi Kudo, Yoshinao Kawasaki, Minolu Soraoka, Tsunehiko Tsubone, Shinichi Tachi +1 more | 1990-03-27 |
| 4857137 | Process for surface treatment | Shinichi Tachi, Sadayuki Okudaira, Kiichiro Mukai | 1989-08-15 |