Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791130 | Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device | Koichi Hamada, Megumi Kimura, Momoyo Enyama, Ryou YUMIBA, Makoto Sakakibara +4 more | 2023-10-17 |
| 10984980 | Charged particle beam device for imaging vias inside trenches | Kei Sakai, Satoru Yamaguchi, Hideki ITAI, Kumiko Shimizu | 2021-04-20 |
| 10976536 | Image-forming device, and dimension measurement device | Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao | 2021-04-13 |
| 10665420 | Charged particle beam apparatus | Satoru Yamaguchi, Kei Sakai, Hideki ITAI, Yoshinori Momonoi, Toshimasa Kameda +1 more | 2020-05-26 |
| 10620421 | Image-forming device, and dimension measurement device | Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao | 2020-04-14 |
| 10417756 | Pattern measurement apparatus and defect inspection apparatus | Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao | 2019-09-17 |
| 10197783 | Image-forming device, and dimension measurement device | Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao | 2019-02-05 |