Issued Patents All Time
Showing 51–67 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5831273 | Charged particle beam lithography method and apparatus thereof | Yasuhiro Someda, Yasunari Sohda, Hiroyuki Itoh | 1998-11-03 |
| 5650631 | Electron beam writing system | Yasunari Sohda, Masahide Okumura, Yasuhiro Someda, Hidetoshi Satoh, Norio Saitou | 1997-07-22 |
| 5601686 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more | 1997-02-11 |
| 5562800 | Wafer transport method | Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more | 1996-10-08 |
| 5527501 | Process for producing piezoelectric ceramic sheet and dielectric ceramic sheet | Yasushi Sawada, Eturo Yasuda, Hiroshi Matuoka, Michihiro Wakimoto, Masahiro Tomita | 1996-06-18 |
| 5520297 | Aperture plate and a method of manufacturing the same | Teruyuki Kagami, Sakae Yaita, Niro Katane, Mitsuo Tanabe, Hidetoshi Satoh | 1996-05-28 |
| 5468969 | Method and apparatus for electron beam lithography | Hiroyuki Itoh, Hideo Todokoro, Yasunari Sohda | 1995-11-21 |
| 5424173 | Electron beam lithography system and method | Hiroaki Wakabayashi, Osamu Suga, Shinji Okazaki | 1995-06-13 |
| 5396077 | Electron beam lithography apparatus having electron optics correction system | Yasunari Sohda, Hiroyuki Itoh, Yasuhiro Someda, Hidetoshi Satoh, Genya Matsuoka | 1995-03-07 |
| 5334282 | Electron beam lithography system and method | Shinji Okazaki | 1994-08-02 |
| 5334845 | Charged beam exposure method and apparatus as well as aperture stop and production method thereof | Hiroaki Wakabayashi, Fumio Murai, Shinji Okazaki | 1994-08-02 |
| 5283440 | Electron beam writing system used in a cell projection method | Yasunari Sohda, Hideo Todokoro, Norio Saitou, Haruo Yoda, Hiroyuki Itoh +2 more | 1994-02-01 |
| 5229607 | Combination apparatus having a scanning electron microscope therein | Hironobu Matsui, Mikio Ichihashi, Sumio Hosaka, Satoshi Haraichi, Fumikazu Itoh +9 more | 1993-07-20 |
| 5097138 | Electron beam lithography system and method | Hiroaki Wakabayashi, Osamu Suga, Shinji Okazaki | 1992-03-17 |
| 4812287 | Nickel-chromium stainless steel having improved corrosion resistances and machinability | Kikuo Takizawa | 1989-03-14 |
| 4740693 | Electron beam pattern line width measurement system | Shinji Okazaki, Hidehito Obayashi, Mikio Ichihashi | 1988-04-26 |
| 4737973 | Crystal monochromator | Taro Ogawa, Shinji Kuniyoshi, Takeshi Kimura | 1988-04-12 |