Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610756 | Charged particle beam apparatus and control method | Ryota Watanabe, Yuzuru Mizuhara, Daisuke Bizen | 2023-03-21 |
| 11456150 | Charged particle beam device | Yuzuru Mizuhara, Minoru Yamazaki, Daisuke Bizen, Noritsugu Takahashi | 2022-09-27 |
| 11435178 | Calibration sample, electron beam adjustment method and electron beam apparatus using same | Yasunari Sohda, Yoshinori Nakayama, Hiroya Ohta, Yusuke Abe | 2022-09-06 |
| 11276554 | Scanning electron microscope and method for measuring pattern | Takeyoshi Ohashi, Yusuke Abe, Kenji Tanimoto, Hyejin Kim | 2022-03-15 |
| 11251018 | Scanning electron microscope | Yasunari Sohda, Yusuke Abe, Kenji Tanimoto | 2022-02-15 |
| 10636618 | Charged particle beam apparatus | Yasunari Sohda, Makoto Sakakibara, Hiroya Ohta, Kenji Tanimoto, Yusuke Abe | 2020-04-28 |