Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6101237 | X-ray mask and X-ray exposure method using the same | Takeshi Miyachi, Hiroshi Osawa, Koichi Sentoku, Hiroshi Maehara | 2000-08-08 |
| 6087076 | Method of manufacturing semiconductor devices by performing coating, heating, exposing and developing in a low-oxygen or oxygen free controlled environment | Keita Sakai, Hiroshi Maehara | 2000-07-11 |
| 5952149 | Resist solution for photolithography including a base resin and an oxygen-free or low-oxygen solvent | Keita Sakai, Hiroshi Maehara | 1999-09-14 |
| 5882826 | Membrane and mask, and exposure apparatus using the mask, and device producing method using the mask | Hideo Kato, Hiroshi Maehara | 1999-03-16 |
| 5870448 | X-ray mask and fabrication process using it | Hiroshi Maehara | 1999-02-09 |
| 5846676 | Mask structure and exposure method and apparatus using the same | Takayuki Yagi | 1998-12-08 |
| 5770335 | Mask and exposure apparatus using the same | Akira Miyake | 1998-06-23 |
| 5733688 | Lithographic mask structure and method of producing the same comprising W and molybdenum alloy absorber | Hideo Kato, Masao Sugata, Hiroshi Maehara | 1998-03-31 |
| 5656398 | Method of making X-ray mask structure | Takeshi Miyachi, Yasuaki Fukuda | 1997-08-12 |
| 5589304 | Photomask comprising a holding frame and reinforcing member with a ceramic oxide bond | Takeshi Miyachi | 1996-12-31 |
| 5553110 | X-ray mask structure, process for production thereof, apparatus and method for X-ray exposure with the X-ray mask structure, and semiconductor device produced by the X-ray exposure method | Koichi Sentoku, Kenji Saito, Hiroshi Maehara | 1996-09-03 |
| 5422921 | X-ray mask structure and manufacturing methods including forming a metal oxide film on a portion of an X-ray permeable film having no X-ray absorber thereon | — | 1995-06-06 |
| 4764528 | 2,4-pentadienoic acid derivatives and platelet aggregation inhibitors containing the same | Makoto Takai, Toshio Wakabayashi | 1988-08-16 |
| 4735877 | Lithographic mask structure and lithographic process | Hideo Kato, Yoshie Izawa | 1988-04-05 |