Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9761466 | Apparatus and method for cleaning semiconductor substrate | Yoshihiro Ogawa, Hiroshi Kawamoto | 2017-09-12 |
| 8758521 | Apparatus and method for cleaning semiconductor substrate | Yoshihiro Ogawa, Hiroshi Kawamoto | 2014-06-24 |
| 8066020 | Substrate cleaning apparatus and substrate cleaning method | Hiroshi Tomita, Hiroaki Yamada, Kunihiro Miyazaki | 2011-11-29 |
| 7032447 | Diaphragm gas meter | — | 2006-04-25 |
| 6412501 | Drying apparatus and drying method | Kazutoshi Watanabe, Hiroki Takahashi | 2002-07-02 |
| 5657553 | Substrate drying apparatus | Tetsuya Tarui, Hiromitsu Asano | 1997-08-19 |
| 5516350 | Process for producing synthetic quartz glass powder | Hiroshi Ota, Kazumi Kimura, Akira Utsunomiya, Masaru Shimoyama | 1996-05-14 |
| 5199307 | Automatic power generation type flowmeter | Wataru Sato | 1993-04-06 |
| 4548084 | Flow meter | Kunio Arakawa | 1985-10-22 |
| 4265127 | Low meter system provided with a pulse generator | — | 1981-05-05 |