Issued Patents All Time
Showing 1–25 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12408556 | Piezoelectric stack, piezoelectric element, and method of manufacturing piezoelectric stack | Kenji Shibata, Fumimasa Horikiri | 2025-09-02 |
| 11805700 | Laminated substrate having piezoelectric film, element having piezoelectric film and method for manufacturing this laminated substrate | Kenji Shibata, Fumimasa Horikiri | 2023-10-31 |
| 11800808 | Piezoelectric stack, piezoelectric element, and method of manufacturing piezoelectric stack | Kenji Shibata, Toshiaki Kuroda | 2023-10-24 |
| 11744159 | Piezoelectric laminate, method of manufacturing piezoelectric laminate and piezoelectric element | Kenji Shibata, Fumimasa Horikiri | 2023-08-29 |
| 11557713 | Laminated substrate having piezoelectric film, element having piezoelectric film and method for manufacturing this laminated substrate | Kenji Shibata, Fumimasa Horikiri | 2023-01-17 |
| 11367826 | Piezoelectric laminate, method of manufacturing the piezoelectric laminate and piezoelectric device | Kenji Shibata, Fumimasa Horikiri | 2022-06-21 |
| 11107971 | Laminated substrate with piezoelectric thin film, piezoelectric thin film element and method for manufacturing this element | Kenji Shibata, Fumimasa Horikiri | 2021-08-31 |
| 10837982 | Scanning probe microscope and scanning method using the same | Masatsugu Shigeno, Hiroyoshi Yamamoto | 2020-11-17 |
| 10658569 | Method for manufacturing niobate-system ferroelectric thin-film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Masaki Noguchi, Kenji Kuroiwa | 2020-05-19 |
| 10497855 | Ferroelectric thin-film laminated substrate, ferroelectric thin-film device, and manufacturing method of ferroelectric thin-film laminated substrate | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Hiroyuki Endo | 2019-12-03 |
| 10345335 | Scanning probe microscope and scanning method thereof | Masatsugu Shigeno, Hiroyoshi Yamamoto | 2019-07-09 |
| 10276777 | Ferroelectric thin-film laminated substrate, ferroelectric thin-film device,and manufacturing method of ferroelectric thin-film laminated substrate | Fumimasa Horikiri, Kenji Shibata, Masaki Noguchi, Kazufumi Suenaga | 2019-04-30 |
| 10211044 | Method for manufacturing ferroelectric thin film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga | 2019-02-19 |
| 10199564 | Method for manufacturing niobate-system ferroelectric thin-film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Masaki Noguchi, Kenji Kuroiwa | 2019-02-05 |
| 10186655 | Method for manufacturing ferroelectric thin film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga | 2019-01-22 |
| 10181407 | Method for manufacturing niobate-system ferroelectric thin-film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Masaki Noguchi, Kenji Kuroiwa | 2019-01-15 |
| 10161958 | Three-dimensional fine movement device | Masatsugu Shigeno, Masafumi Watanabe | 2018-12-25 |
| 10151773 | Scanning probe microscope and probe contact detection method | Masatsugu Shigeno, Masafumi Watanabe, Hiroyoshi Yamamoto, Kazuo Chinone | 2018-12-11 |
| 9893266 | Piezoelectric film element, and piezoelectric film device including piezoelectric film including alkali niobate-based perovskite structure | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Akira Nomoto | 2018-02-13 |
| 9882546 | Alkali-niobate-based piezoelectric thin film element | Kazufumi Suenaga, Kenji Shibata, Fumimasa Horikiri, Masaki Noguchi | 2018-01-30 |
| 9766267 | Actuator position calculation device, actuator position calculation method, and actuator position calculation program | Masatsugu Shigeno, Shigeru Wakiyama, Masafumi Watanabe | 2017-09-19 |
| 9685603 | Method for manufacturing niobate-system ferroelectric thin film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Masaki Noguchi | 2017-06-20 |
| 9620703 | Piezoelectric thin-film element, piezoelectric sensor and vibration generator | Kenji Shibata, Masaki Noguchi, Kazufumi Suenaga, Fumimasa Horikiri | 2017-04-11 |
| 9406867 | Method for manufacturing a piezoelectric film wafer, piezolelectric film element, and piezoelectric film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Akira Nomoto | 2016-08-02 |
| 9385297 | Method for manufacturing niobate-system ferroelectric thin film device | Fumimasa Horikiri, Kenji Shibata, Kazufumi Suenaga, Masaki Noguchi | 2016-07-05 |