SW

Shigeru Wakiyama

SI Seiko Instruments: 11 patents #151 of 1,437Top 15%
SN Sii Nanotechnology: 7 patents #20 of 157Top 15%
Mitsubishi Electric: 6 patents #4,940 of 25,717Top 20%
AT Agency Of Industrial Science And Technology: 2 patents #293 of 1,778Top 20%
HS Hitachi High-Tech Science: 1 patents #94 of 167Top 60%
Overall (All Time): #239,171 of 4,157,543Top 6%
19
Patents All Time

Issued Patents All Time

Showing 1–19 of 19 patents

Patent #TitleCo-InventorsDate
9766267 Actuator position calculation device, actuator position calculation method, and actuator position calculation program Masatsugu Shigeno, Masafumi Watanabe, Kazutoshi Watanabe 2017-09-19
8495759 Probe aligning method for probe microscope and probe microscope operated by the same Hiroyoshi Yamamoto, Yoshiteru Shikakura, Itaru Kitajima 2013-07-23
7945964 Apparatus structure and scanning probe microscope including apparatus structure Kenichi Akamatsu 2011-05-17
7378654 Processing probe Osamu Takaoka, Masatoshi Yasutake 2008-05-27
7373806 Scanning probe microscope and scanning method Itaru Kitajima, Kazutoshi Watanabe, Masatoshi Yasutake, Akira Inoue 2008-05-20
7278299 Method of processing vertical cross-section using atomic force microscope Osamu Takaoka, Masatoshi Yasutake, Naoya Watanabe 2007-10-09
7259372 Processing method using probe of scanning probe microscope Osamu Takaoka, Masatoshi Yasutake, Naoya Watanabe 2007-08-21
7232995 Method of removing particle of photomask using atomic force microscope Osamu Takaoka, Masatoshi Yasutake, Naoya Watanabe 2007-06-19
6388249 Surface analyzing apparatus Naohiko Fujino 2002-05-14
6355495 Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof Naohiko Fujino, Isamu Karino, Masahi Ohmori, Masatoshi Yasutake 2002-03-12
6259093 Surface analyzing apparatus Naohiko Fujino 2001-07-10
6255127 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same Naohiko Fujino, Isamu Karino, Masashi Ohmori, Masatoshi Yasutake 2001-07-03
6184519 Surface analyzing apparatus with anti-vibration table Naohiko Fujino 2001-02-06
6124142 Method for analyzing minute foreign substance elements Naohiko Fujino, Isamu Karino, Masashi Ohmori, Masatoshi Yasutake 2000-09-26
5877035 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same Naohiko Fujino, Isamu Karino, Masashi Ohmori, Masatoshi Yasutake 1999-03-02
5453616 Probe microscope having error correction piezoelectric scanner 1995-09-26
5423514 Alignment assembly for aligning a spring element with a laser beam in a probe microscope Hiroyoshi Yamamoto, Masatoshi Yasutake 1995-06-13
4921346 Tunnel current detecting photo-acoustic spectrometer Hiroshi Tokumoto, Hiroshi Bando, Fumiki Sakai, Chikara Miyata 1990-05-01
4866271 Relative displacement control apparatus Masatoshi Ono, Wataru Mizutani, Hiroshi Murakami, Hiroshi Bando, Fumiki Sakai +1 more 1989-09-12