Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6388249 | Surface analyzing apparatus | Shigeru Wakiyama | 2002-05-14 |
| 6355495 | Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof | Isamu Karino, Masahi Ohmori, Masatoshi Yasutake, Shigeru Wakiyama | 2002-03-12 |
| 6259093 | Surface analyzing apparatus | Shigeru Wakiyama | 2001-07-10 |
| 6255127 | Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same | Isamu Karino, Masashi Ohmori, Masatoshi Yasutake, Shigeru Wakiyama | 2001-07-03 |
| 6184519 | Surface analyzing apparatus with anti-vibration table | Shigeru Wakiyama | 2001-02-06 |
| 6182675 | Apparatus for recovering impurities from a silicon wafer | Jiro Naka, Noriko Hirano, Junji Kobayashi, Kazuo Kuramoto | 2001-02-06 |
| 6124142 | Method for analyzing minute foreign substance elements | Isamu Karino, Masashi Ohmori, Masatoshi Yasutake, Shigeru Wakiyama | 2000-09-26 |
| 6110291 | Thin film forming apparatus using laser | Kenyu Haruta, Koichi Ono, Hitoshi Wakata, Mutsumi Tsuda, Yoshio Saito +22 more | 2000-08-29 |
| 5907398 | Particle detecting method and system for detecting minute particles on a workpiece | Junji Kobayashi | 1999-05-25 |
| 5877035 | Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same | Isamu Karino, Masashi Ohmori, Masatoshi Yasutake, Shigeru Wakiyama | 1999-03-02 |
| 5715052 | Method of detecting the position and the content of fine foreign matter on substrates and analyzers used therefor | Isamu Karino | 1998-02-03 |
| 5650614 | Optical scanning system utilizing an atomic force microscope and an optical microscope | Masatoshi Yasutake | 1997-07-22 |
| 5590672 | Semiconductor cleaning apparatus and wafer cassette | Masashi Ohmori, Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Satoru Kotoh | 1997-01-07 |
| 5568821 | Semiconductor cleaning apparatus and wafer cassette | Masashi Ohmori, Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Satoru Kotoh | 1996-10-29 |
| 5551459 | Semiconductor cleaning apparatus and wafer cassette | Masashi Ohmori, Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Satoru Kotoh | 1996-09-03 |
| 5517027 | Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these | Yoshitsugu Nakagawa, Fusami Soeda, Isamu Karino, Osamu Wada, Hiroshi Kurokawa +6 more | 1996-05-14 |
| 5445171 | Semiconductor cleaning apparatus and wafer cassette | Masashi Ohmori, Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Satoru Kotoh | 1995-08-29 |