Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6715944 | Apparatus for removing photoresist film | Izumi Oya, Seiji Noda, Makoto Miyamoto, Masaki Kuzumoto, Tatsuo Kataoka | 2004-04-06 |
| 6517999 | Method of removing photoresist film | Izumi Oya, Seiji Noda, Makoto Miyamoto, Masaki Kuzumoto, Tatsuo Kataoka | 2003-02-11 |
| 6255127 | Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same | Naohiko Fujino, Isamu Karino, Masatoshi Yasutake, Shigeru Wakiyama | 2001-07-03 |
| 6124142 | Method for analyzing minute foreign substance elements | Naohiko Fujino, Isamu Karino, Masatoshi Yasutake, Shigeru Wakiyama | 2000-09-26 |
| 5877035 | Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same | Naohiko Fujino, Isamu Karino, Masatoshi Yasutake, Shigeru Wakiyama | 1999-03-02 |
| 5590672 | Semiconductor cleaning apparatus and wafer cassette | Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh | 1997-01-07 |
| 5568821 | Semiconductor cleaning apparatus and wafer cassette | Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh | 1996-10-29 |
| 5551459 | Semiconductor cleaning apparatus and wafer cassette | Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh | 1996-09-03 |
| 5517027 | Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these | Yoshitsugu Nakagawa, Fusami Soeda, Naohiko Fujino, Isamu Karino, Osamu Wada +6 more | 1996-05-14 |
| 5470392 | Semiconductor device processing method | Yoshiaki Yamada, Junji Iwasaki | 1995-11-28 |
| 5445171 | Semiconductor cleaning apparatus and wafer cassette | Hiroshi Tanaka, Akira Nishimoto, Hiroshi Sasai, Naohiko Fujino, Satoru Kotoh | 1995-08-29 |
| 5432601 | Fine particle analyzing device | Hiroshi Tanaka | 1995-07-11 |
| 5383482 | Semiconductor processing apparatus and module | Yoshiaki Yamada, Junji Iwasaki | 1995-01-24 |
| 5379785 | Cleaning apparatus | Satoru Kotoh, Shinji Nakajima | 1995-01-10 |
| 5193509 | Fuel control system for automotive power plant | Yasuhiro Harada, Shinichi Wakutani, Hiroshi Ebino | 1993-03-16 |
| 5187118 | Method of manufacturing semiconductor devices | Youichi Midou | 1993-02-16 |
| 5076207 | Apparatus for atmospheric chemical vapor deposition | Akihiro Washitani, Kouichirou Tsutahara, Toru Yamaguchi | 1991-12-31 |
| 4982567 | Air supply control systems for turbocharged internal combustion engines | Takayoshi Hashimoto, Masanori Shibata, Haruo Okimoto, Seiji Tashima, Kaoru Yamada +3 more | 1991-01-08 |