Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6568996 | Polishing agent for processing semiconductor, dispersant used therefor and process for preparing semiconductor device using above polishing agent for processing semiconductor | Toshio Kobayashi, Toshiyuki Toyoshima, Suguru Nagae, Masanobu Iwasaki, Shin Hasegawa | 2003-05-27 |
| 5976260 | Semiconductor producing apparatus, and wafer vacuum chucking device, gas cleaning method and nitride film forming method in semiconductor producing apparatus | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1999-11-02 |
| 5803938 | Liquid vaporizing apparatus | Tooru Yamaguchi, Takayuki Suenaga | 1998-09-08 |
| 5785902 | Liquid vaporizing apparatus | Tooru Yamaguchi, Takayuki Suenaga | 1998-07-28 |
| 5662838 | Liquid vaporizing apparatus | Tooru Yamaguchi, Takayuki Suenaga | 1997-09-02 |
| 5534073 | Semiconductor producing apparatus comprising wafer vacuum chucking device | Yoshimi Kinoshita, Tomoyuki Kanda, Katsuhisa Kitano, Kazuo Yoshida, Hiroshi Ohnishi +9 more | 1996-07-09 |
| 5520858 | Liquid vaporizing apparatus | Tooru Yamaguchi, Takayuki Suenaga | 1996-05-28 |
| 5076207 | Apparatus for atmospheric chemical vapor deposition | Akihiro Washitani, Masashi Ohmori, Toru Yamaguchi | 1991-12-31 |
| 5025133 | Semiconductor wafer heating device | Hiroshi Tanaka | 1991-06-18 |