Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7465216 | Polishing apparatus | Yoshio Hayashide | 2008-12-16 |
| 7465221 | Polishing apparatus | Yoshio Hayashide | 2008-12-16 |
| 7258598 | Polishing solution supply system, method of supplying polishing solution, apparatus for and method of polishing semiconductor substrate and method of manufacturing semiconductor device | Yoshio Hayashide | 2007-08-21 |
| 6727170 | Semiconductor device having an improved interlayer conductor connections and a manufacturing method thereof | Yoshifumi Takata, Yuichi Sakai, Hiroyuki Chibahara | 2004-04-27 |
| 6602725 | Method of manufacturing a semiconductor device having a monitor pattern, and a semiconductor device manufactured thereby | Yuichi Sakai, Hiroyuki Chibahara, Kakutaro Suda | 2003-08-05 |
| 6568996 | Polishing agent for processing semiconductor, dispersant used therefor and process for preparing semiconductor device using above polishing agent for processing semiconductor | Toshio Kobayashi, Toshiyuki Toyoshima, Suguru Nagae, Kouichirou Tsutahara, Shin Hasegawa | 2003-05-27 |
| 6303944 | Method of manufacturing a semiconductor device having a monitor pattern, and a semiconductor device manufactured thereby | Yuichi Sakai, Hiroyuki Chibahara, Kakutaro Suda | 2001-10-16 |
| 6278187 | Semiconductor device having an improved interlayer conductor connections and a manufacturing method thereof | Yoshifumi Takata, Yuichi Sakai, Hiroyuki Chibahara | 2001-08-21 |
| 6211070 | Peripheral structure of a chip as a semiconductor device, and manufacturing method thereof | Katsuhiro Tsukamoto | 2001-04-03 |
| 5945716 | Semiconductor wafer and device structure | Katsuhiro Tsukamoto | 1999-08-31 |
| 5470799 | Method for pretreating semiconductor substrate by photochemically removing native oxide | Hiromi Itoh, Akira Tokui, Katsuhiro Tsukamoto | 1995-11-28 |
| 5429991 | Method of forming thin film for semiconductor device | Hiromi Itoh | 1995-07-04 |
| 5407867 | Method of forming a thin film on surface of semiconductor substrate | Hiromi Itoh, Akira Tokui, Katsuyoshi Mitsui, Katsuhiro Tsukamoto | 1995-04-18 |
| 5240505 | Method of an apparatus for forming thin film for semiconductor device | Hiromi Itoh | 1993-08-31 |
| 5174881 | Apparatus for forming a thin film on surface of semiconductor substrate | Hiromi Itoh, Akira Tokui, Katsuyoshi Mitsui, Katsuhiro Tsukamoto | 1992-12-29 |