Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5470799 | Method for pretreating semiconductor substrate by photochemically removing native oxide | Hiromi Itoh, Masanobu Iwasaki, Katsuhiro Tsukamoto | 1995-11-28 |
| 5407867 | Method of forming a thin film on surface of semiconductor substrate | Masanobu Iwasaki, Hiromi Itoh, Katsuyoshi Mitsui, Katsuhiro Tsukamoto | 1995-04-18 |
| 5384218 | Photomask and pattern transfer method for transferring a pattern onto a substrate having different levels | Maria O. DeBeeck | 1995-01-24 |
| 5270796 | Apparatus for inspecting a phase shift mask | Tetsuro Hanawa | 1993-12-14 |
| 5258266 | Method of forming minute patterns using positive chemically amplifying type resist | Masahiro Yoneda | 1993-11-02 |
| 5178682 | Method for forming a thin layer on a semiconductor substrate and apparatus therefor | Katsuhiro Tsukamoto | 1993-01-12 |
| 5174881 | Apparatus for forming a thin film on surface of semiconductor substrate | Masanobu Iwasaki, Hiromi Itoh, Katsuyoshi Mitsui, Katsuhiro Tsukamoto | 1992-12-29 |
| 5158861 | Method of forming minute patterns using chemically amplifying type resist | Masahiro Yoneda | 1992-10-27 |
| 5028560 | Method for forming a thin layer on a semiconductor substrate | Katsuhiro Tsukamoto | 1991-07-02 |
| 4956310 | Semiconductor memory device and fabricating method thereof | Shinichi Sato, Akira Kawai, Masayuki Nakajima, Hiroji Ozaki, Masao Nagatomo | 1990-09-11 |
| 4763182 | Semiconductor memory device with deep bit-line channel stopper | Hiroji Ozaki, Shinichi Sato, Akira Kawai, Masayuki Nakajima, Masao Nagatomo | 1988-08-09 |
| 4702796 | Method for fabricting a semiconductor device | Masayuki Nakajima, Shinichi Sato, Akira Kawai, Masao Nagatomo, Hiroji Ozaki | 1987-10-27 |