Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748360 | Manufacturing method of semiconductor device | Takuya Hagiwara | 2017-08-29 |
| 7727709 | Method of forming resist pattern and method of manufacturing semiconductor device | Toshifumi Suganaga, Takeo Ishibashi | 2010-06-01 |
| 6731375 | Projection aligner, exposing method and semiconductor device | — | 2004-05-04 |
| 6057066 | Method of producing photo mask | — | 2000-05-02 |
| 5981146 | Resist coating film | Teruhiko Kumada, Atsuko Sasahara, Youko Tanaka, Hideo Horibe, Shigeru Kubota +1 more | 1999-11-09 |
| 5512422 | Method of forming resist pattern and organic silane compound for forming anti-reflection film for use in such method | Maria OP DE BEECK | 1996-04-30 |
| 5429910 | Method of forming a critical resist pattern | — | 1995-07-04 |
| 5380889 | Method of forming resist pattern and organic silane compound for forming anti-relflection film for use in such method | Maria Op de Beeck | 1995-01-10 |
| 5328560 | Method of manufacturing semiconductor device | Maria Op de Beeck | 1994-07-12 |
| 5270796 | Apparatus for inspecting a phase shift mask | Akira Tokui | 1993-12-14 |