Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10418327 | Semiconductor device | — | 2019-09-17 |
| 9711344 | Semiconductor device manufacturing method using a multilayer resist | — | 2017-07-18 |
| 7727709 | Method of forming resist pattern and method of manufacturing semiconductor device | Tetsuro Hanawa, Takeo Ishibashi | 2010-06-01 |
| 6717652 | Exposure apparatus, exposure method and semiconductor device fabricated with the exposure method | — | 2004-04-06 |
| 6352800 | Reticle for use in exposing semiconductor, method of producing the reticle, and semiconductor device | — | 2002-03-05 |
| 6295629 | Focus correcting method and method of manufacturing semiconductor device | — | 2001-09-25 |
| 6087693 | Semiconductor device with reduced stepped portions | Eiichi Ishikawa | 2000-07-11 |
| 5776825 | Method for forming a semiconductor device having reduced stepped portions | Eiichi Ishikawa | 1998-07-07 |
| 5539231 | Dynamic random access memory device having reduced stepped portions | Eiichi Ishikawa | 1996-07-23 |