| 8920741 |
Ozone generating apparatus |
Noboru Wada, Yasutaka Inanaga |
2014-12-30 |
| 8444831 |
Method of generating ozone |
Youichiro Tabata, Hajime Nakatani |
2013-05-21 |
| 8328998 |
Ozone generating apparatus |
Noboru Wada, Yasutaka Inanaga |
2012-12-11 |
| 7965372 |
Apparatus for removing photoresist film |
Seiji Noda, Izumi Oya, Makoto Miyamoto |
2011-06-21 |
| 7922979 |
Silent discharge plasma apparatus |
Noboru Wada, Hajime Nakatani, Hiroyuki Igehara, Norimitsu Esaki, Shingo MINE +1 more |
2011-04-12 |
| 7785406 |
Apparatus for volatile organic compound treatment and method of volatile organic compound treatment |
Kouji Ota, Yasutaka Inanaga, Yasuhiro Tanimura, Hajime Nakatani, Hideo Ichimura +3 more |
2010-08-31 |
| 7713495 |
Ozone generating apparatus |
Noboru Wada, Yasutaka Inanaga |
2010-05-11 |
| RE40746 |
Ozonizer |
Yujiro Okihara, Youichiro Tabata, Akaru Usui, Hiromichi Komiya, Yuji Ganryu +4 more |
2009-06-16 |
| 7316734 |
Volatile organic compound treatment apparatus |
Koji Ohta, Yasuhiro Tanimura, Hajime Nakatani, Toshiaki Yoshizumi, Hideo Ichimura |
2008-01-08 |
| 7108836 |
Ozonizer |
Yujiro Okihara, Youichiro Tabata, Akaru Usui, Hiromichi Komiya, Yuji Ganryu +4 more |
2006-09-19 |
| 6955178 |
Substrate treatment apparatus |
Seiji Noda, Izumi Oya, Makoto Miyamoto, Hideo Horibe, Tatsuo Kataoka +1 more |
2005-10-18 |
| 6905659 |
Ozonizer |
Akaru Usui, Youichiro Tabata, Yujiro Okihara, Hiromichi Komiya, Yuji Ganryu +4 more |
2005-06-14 |
| 6869575 |
Ozonizer |
Youichiro Tabata, Yujiro Okihara, Akaru Usui, Hiromichi Komiya, Yuji Ganryu +4 more |
2005-03-22 |
| 6866829 |
Ozonizer |
Yujiro Okihara, Youichiro Tabata, Akaru Usui, Hiromichi Komiya, Yuji Ganryu +4 more |
2005-03-15 |
| 6715944 |
Apparatus for removing photoresist film |
Izumi Oya, Seiji Noda, Makoto Miyamoto, Masashi Ohmori, Tatsuo Kataoka |
2004-04-06 |
| 6616773 |
Substrate treatment method |
Seiji Noda, Izumi Oya, Makoto Miyamoto, Hideo Horibe, Tatsuo Kataoka +1 more |
2003-09-09 |
| 6589397 |
Electric energy converting/storing method |
Yasuhiro Tanimura, Junji Hirotsuji, Shigeki Nakayama, Osamu Matsuoka, Masao Nozaki |
2003-07-08 |
| 6537508 |
Electric energy converting/storing system |
Yasuhiro Tanimura, Junji Hirotsuji, Shigeki Nakayama, Osamu Matsuoka, Masao Nozaki |
2003-03-25 |
| 6517998 |
Method for removing photoresist film and apparatus used therefor |
Seiji Noda, Izumi Oya, Makoto Miyamoto |
2003-02-11 |
| 6517999 |
Method of removing photoresist film |
Izumi Oya, Seiji Noda, Makoto Miyamoto, Masashi Ohmori, Tatsuo Kataoka |
2003-02-11 |
| 6093289 |
Ozone generating method |
Youichiro Tabata, Shigenori Yagi, Kenji Yoshizawa, Masahiro Mukai, Junji Ochi +1 more |
2000-07-25 |
| 5948374 |
Ozone generating apparatus |
Youichiro Tabata, Shigenori Yagi, Kenji Yoshizawa, Masahiro Mukai, Junji Ochi +1 more |
1999-09-07 |
| 5942196 |
Ozone generating apparatus |
Yoichiro Tabata |
1999-08-24 |
| 5888271 |
Ozone storing method and ozone storage system |
Yasuhiro Tanimura, Junji Hirotsuji, Shigeki Nakayama |
1999-03-30 |
| 5759497 |
Ozone generating apparatus |
Youichiro Tabata, Shigenori Yagi, Kenji Yoshizawa, Masahiro Mukai, Junji Ochi +1 more |
1998-06-02 |
