Issued Patents All Time
Showing 1–25 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386254 | Template, method for manufacturing template, and method for manufacturing semiconductor device | Kazuhiro Takahata | 2025-08-12 |
| 12232300 | Power semiconductor device and method for manufacturing power semiconductor device | Noriyuki Besshi, Ryuichi Ishii, Masaru Fuku | 2025-02-18 |
| 12078925 | Imprint apparatus and imprint method | Masaki Mitsuyasu, Masato Suzuki, Takuya Kono, Tetsuro Nakasugi | 2024-09-03 |
| 12050401 | Imprinting device, imprinting method, and method for manufacturing semiconductor device | Motoko Suzuki | 2024-07-30 |
| 11899360 | Imprinting method and imprinting apparatus | Masaki Mitsuyasu | 2024-02-13 |
| 11837469 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Tetsuro Nakasugi, Masayuki Hatano | 2023-12-05 |
| 11762285 | Template, patterning method, and method for manufacturing semiconductor device | Anupam Mitra, Masaki Mitsuyasu, Kazuhiro Takahata, Sachiko Kobayashi | 2023-09-19 |
| 11669011 | Template, template manufacturing method, and semiconductor device manufacturing method | Jun Watanabe, Anupam Mitra | 2023-06-06 |
| 11333970 | Imprint device, imprint method and method of manufacturing semiconductor device | — | 2022-05-17 |
| 11004683 | Imprint apparatus, imprint method, and method of manufacturing semiconductor device | Tetsuro Nakasugi, Masayuki Hatano | 2021-05-11 |
| 10022748 | Stencil mask, stencil mask manufacturing method, and imprinting method | Masato Suzuki, Akiko Mimotogi, Yohko Komatsu, Ryoichi Suzuki | 2018-07-17 |
| 9941177 | Pattern accuracy detecting apparatus and processing system | Kentaro Kasa, Kazutaka Ishigo, Manabu Takakuwa, Yoshinori Hagio, Kazuhiro Segawa +4 more | 2018-04-10 |
| 9885960 | Pattern shape adjustment method, pattern shape adjustment system, exposure apparatus, and recording medium | Nobuhiro Komine, Kazuo Tawarayama | 2018-02-06 |
| 9817318 | Mask manufacturing equipment and mask manufacturing method | Tetsuya Kugimiya, Hidenori Sato | 2017-11-14 |
| 9541847 | Imprint method and imprint system | Masato Suzuki, Takuya Kono, Manabu Takakuwa | 2017-01-10 |
| 9040358 | Semiconductor device and method for manufacturing the same | Kiyonori Yoshitomi, Takehiko Ikegami, Yujiro Kawasoe | 2015-05-26 |
| 8846455 | Semiconductor device and method for manufacturing the same | Kiyonori Yoshitomi, Takehiko Ikegami, Yujiro Kawasoe | 2014-09-30 |
| 8778572 | Photomask and pattern forming method | Shingo Kanamitsu | 2014-07-15 |
| 8772179 | Pattern forming method, pattern forming apparatus, and method for manufacturing semiconductor device | Masayuki Hatano | 2014-07-08 |
| 8679731 | Semiconductor device manufacturing method | Takaki Hashimoto, Kazuyuki Masukawa, Yasunobu Kai | 2014-03-25 |
| 8584054 | Photomask manufacturing method and semiconductor device manufacturing method | Masamitsu Itoh, Takashi Hirano | 2013-11-12 |
| 8440376 | Exposure determining method, method of manufacturing semiconductor device, and computer program product | Toshiya Kotani, Michiya Takimoto, Hidefumi Mukai, Soichi Inoue | 2013-05-14 |
| 8419950 | Pattern forming method | Hiroyuki Kashiwagi | 2013-04-16 |
| 8407628 | Photomask manufacturing method and semiconductor device manufacturing method | Masamitsu Itoh, Takashi Hirano | 2013-03-26 |
| 8384229 | Semiconductor device and method for manufacturing the same | Kiyonori Yoshitomi, Takehiko Ikegami, Yujiro Kawasoe | 2013-02-26 |