Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7537871 | Method of manufacturing semiconductor device | Eishi Shiobara | 2009-05-26 |
| 7517621 | Exposure method and method for manufacturing semiconductor device | Kenji Kawano, Kazuyuki Masukawa | 2009-04-14 |
| 7446853 | Exposure method, exposure tool and method of manufacturing a semiconductor device | Shinichi Ito | 2008-11-04 |
| 7440104 | Exposure system, test mask for monitoring polarization, and method for monitoring polarization | Takashi Sato, Keita Asanuma | 2008-10-21 |
| 7436491 | Exposure system, exposure method and method for manufacturing a semiconductor device | — | 2008-10-14 |
| 7386830 | Method for designing an illumination light source, method for designing a mask pattern, method for manufacturing a photomask, method for manufacturing a semiconductor device and a computer program product | — | 2008-06-10 |
| 7327449 | Exposure apparatus inspection method and exposure apparatus | Soichi Inoue | 2008-02-05 |
| 7327436 | Method for evaluating a local flare, correction method for a mask pattern, manufacturing method for a semiconductor device and a computer program product | Satoshi Tanaka, Kenji Chiba, Kei Hayasaki, Kenji Kawano | 2008-02-05 |
| 7286216 | Exposure apparatus inspection method and exposure apparatus | Soichi Inoue | 2007-10-23 |
| 7186485 | Inspection method and a photomask | Satoshi Tanaka, Soichi Inoue | 2007-03-06 |
| 7148138 | Method of forming contact hole and method of manufacturing semiconductor device | Shoji Mimotogi, Hiroko Nakamura, Satoshi Tanaka, Soichi Inoue | 2006-12-12 |
| 7139998 | Photomask designing method, pattern predicting method and computer program product | Tatsuhiko Higashiki, Soichi Inoue | 2006-11-21 |
| 7072040 | Mask for inspecting an exposure apparatus, a method of inspecting an exposure apparatus, and an exposure apparatus | — | 2006-07-04 |
| 7030445 | Power MOSFET, power MOSFET packaged device, and method of manufacturing power MOSFET | — | 2006-04-18 |
| 6930757 | Managing method of exposure apparatus, managing method of mask, exposure method, and manufacturing method of semiconductor device | Takashi Sato | 2005-08-16 |
| 6839132 | Aberration measuring method of projection optical system | Takashi Sato | 2005-01-04 |