Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10537966 | Processing nozzle, processing head, machining apparatus, and control method and control program of processing nozzle | Yuji Sasaki, Hiroshi Ohno, Mitsuo Sasaki, Takashi Obara | 2020-01-21 |
| 10532427 | Optical processing head, optical machining apparatus, and control method and control program of optical processing head | Hiroshi Ohno, Tetsuo Sakai, Mitsuo Sasaki, Takashi Obara, Yuji Sasaki +1 more | 2020-01-14 |
| 10449560 | Optical processing nozzle and optical machining apparatus | Hiroshi Ohno, Yuji Sasaki, Mitsuo Sasaki, Takashi Obara | 2019-10-22 |
| 10369661 | Optical processing head, optical machining apparatus, and optical processing method | Hiroshi Ohno, Yuji Sasaki, Mitsuo Sasaki, Takashi Obara | 2019-08-06 |
| 10371645 | Optical processing head, optical processing apparatus, and control method and control program of optical processing apparatus | Hiroshi Ohno, Yuji Sasaki, Mitsuo Sasaki, Takashi Obara | 2019-08-06 |
| 9959613 | Optical Processing head, optical processing apparatus, and control method and control program of optical processing apparatus | Hiroshi Ohno, Takashi Obara, Yuji Sasaki, Mitsuo Sasaki | 2018-05-01 |
| 9257367 | Integrated circuit device, method for producing mask layout, and program for producing mask layout | Motohiro Okada, Shuhei Sota, Takaki Hashimoto, Yasunobu Kai, Yuko Kono +3 more | 2016-02-09 |
| 9086634 | Production method and evaluation apparatus for mask layout | Yuko Kono, Toshiya Kotani, Chikaaki Kodama, Yasunobu Kai | 2015-07-21 |
| 8956791 | Exposure tolerance estimation method and method for manufacturing semiconductor device | Osamu Yamane, Yasunobu Kai | 2015-02-17 |
| 8912089 | Method for manufacturing a semiconductor device including a stacked body comprising pluralities of first and second metallic conductive layers | Seiichi Omoto, Yoshihiro Uozumi, Tadashi Iguchi, Osamu Yamane, Yoshihiro Yanai | 2014-12-16 |
| 8679731 | Semiconductor device manufacturing method | Kazuya Fukuhara, Takaki Hashimoto, Yasunobu Kai | 2014-03-25 |
| 8293456 | Semiconductor device manufacturing method | Kazuya Fukuhara, Takaki Hashimoto, Yasunobu Kai | 2012-10-23 |
| 7998642 | Mask pattern data creation method and mask | Chikaaki Kodama, Hirotaka Ichikawa, Toshiya Kotani | 2011-08-16 |
| 7934175 | Parameter adjustment method, semiconductor device manufacturing method, and recording medium | Toshiya Kotani, Yasunobu Kai, Soichi Inoue, Satoshi Tanaka, Shigeki Nojima +1 more | 2011-04-26 |
| 7851914 | Semiconductor integrated circuit device | Koji Hashimoto, Hidefumi Mukai, Kosuke Yanagidaira | 2010-12-14 |
| 7517621 | Exposure method and method for manufacturing semiconductor device | Kazuya Fukuhara, Kenji Kawano | 2009-04-14 |