Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7440104 | Exposure system, test mask for monitoring polarization, and method for monitoring polarization | Takashi Sato, Kazuya Fukuhara | 2008-10-21 |
| 7164960 | Apparatus for correcting a plurality of exposure tools, method for correcting a plurality of exposure tools, and method for manufacturing semiconductor device | Nobuhiro Komine, Shigeki Nojima | 2007-01-16 |
| 6872508 | Exposure method and method of manufacturing semiconductor device | Nobuhiro Komine, Tatsuhiko Higashiki | 2005-03-29 |
| 6842230 | Exposing method | Manabu Takakuwa, Tatsuhiko Higashiki | 2005-01-11 |
| 6288556 | Method of electrical measurement of misregistration of patterns | Takashi Sato, Junichiro Iba, Toru Ozaki, Hiroshi Nomura, Tatsuhiko Higashiki | 2001-09-11 |
| 6008880 | Exposure tool and method capable of correcting high (N-TH) order light exposure errors depending upon an interfield coordinate | Tatsuhiko Higashiki | 1999-12-28 |