Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6600189 | Semiconductor device and semiconductor device manufacturing method | Tsutomu Sato, Ichiro Mizushima, Yoshitaka Tsunashima | 2003-07-29 |
| 6534814 | Method of manufacturing a semiconductor memory device having a trench capacitor with sufficient capacitance and small junction leak current | Yusuke Kohyama | 2003-03-18 |
| 6440644 | Planarization method and system using variable exposure | Takashi Sato, Katsuya Okumura | 2002-08-27 |
| 6313535 | Wiring layer of a semiconductor integrated circuit | Masaki Narita, Tomio Katata | 2001-11-06 |
| 6288556 | Method of electrical measurement of misregistration of patterns | Takashi Sato, Keita Asanuma, Toru Ozaki, Hiroshi Nomura, Tatsuhiko Higashiki | 2001-09-11 |
| 6107135 | Method of making a semiconductor memory device having a buried plate electrode | Richard L. Kleinhenz, Gary B. Bronner | 2000-08-22 |
| 6100130 | Method of manufacturing a semiconductor memory device having a trench capacitor | Yusuke Kohyama | 2000-08-08 |
| 6100132 | Method of deforming a trench by a thermal treatment | Tsutomu Sato, Ichiro Mizushima, Yoshitaka Tsunashima | 2000-08-08 |
| 6064466 | Planarization method and system using variable exposure | Takashi Sato, Katsuya Okumura | 2000-05-16 |
| 6011611 | Method of measuring aberration of projection optics | Hiroshi Nomura, Takashi Sato, Takuya Kono | 2000-01-04 |
| 5883006 | Method for making a semiconductor device using a flowable oxide film | — | 1999-03-16 |
| 5715040 | Illumination aperture of low intensity loss | — | 1998-02-03 |