Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8148274 | Semiconductor device having oxidized metal film and manufacture method of the same | Junichi Wada, Atsuko Sakata, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita +5 more | 2012-04-03 |
| 7994054 | Semiconductor device having oxidized metal film and manufacture method of the same | Atsuko Sakata, Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita +5 more | 2011-08-09 |
| 7791202 | Semiconductor device having oxidized metal film and manufacture method of the same | Atsuko Sakata, Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita +5 more | 2010-09-07 |
| 7399706 | Manufacturing method of semiconductor device | Seiichi Omoto, Kazuyuki Higashi, Hitomi Yamaguchi, Hirokazu Ezawa, Atsuko Sakata | 2008-07-15 |
| 7351656 | Semiconductor device having oxidized metal film and manufacture method of the same | Atsuko Sakata, Junichi Wada, Seiichi Omoto, Masaaki Hatano, Soichi Yamashita +5 more | 2008-04-01 |
| 6946387 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2005-09-20 |
| 6768202 | Semiconductor device and method of manufacturing the same | Yasushi Oikawa, Junichi Wada | 2004-07-27 |
| 6720253 | Method of manufacturing semiconductor device having an aluminum wiring layer | Junichi Wada, Yasushi Oikawa | 2004-04-13 |
| 6699726 | Semiconductor device and method for the manufacture thereof | Osamu Hidaka, Sumito Ootsuki, Hiroshi Mochizuki, Hiroyuki Kanaya, Kumi Okuwada +2 more | 2004-03-02 |
| 6673704 | Semiconductor device and method of manufacturing the same | Junichi Wada, Atsuko Sakata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2004-01-06 |
| 6605521 | Method of forming an oxide film on a gate side wall of a gate structure | Atul Ajmera, Karanam Balasubramanyam, Shang-Bin Ko | 2003-08-12 |
| 6566632 | Hot plate and semiconductor device manufacturing method using the same | Nobuo Hayasaka, Katsuya Okumura | 2003-05-20 |
| 6521927 | Semiconductor device and method for the manufacture thereof | Osamu Hidaka, Sumito Ootsuki, Hiroshi Mochizuki, Hiroyuki Kanaya, Kumi Okuwada +2 more | 2003-02-18 |
| 6521010 | Filter, filtering frame, and semiconductor device manufacturing method and apparatus | — | 2003-02-18 |
| 6500686 | Hot plate and method of manufacturing semiconductor device | Junichi Wada | 2002-12-31 |
| 6462395 | Semiconductor device and method of producing the same | Masatoshi Fukuda, Toshiya Suzuki, Naofumi Nakamura | 2002-10-08 |
| 6440843 | Semiconductor device and method for manufacturing the same | Junichi Wada, Atsuko Sakata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2002-08-27 |
| 6436813 | Semiconductor device and method of manufacturing the same | Yasushi Oikawa, Junichi Wada | 2002-08-20 |
| 6423192 | Sputtering apparatus and film forming method | Junichi Wada, Hideto Matsuyama, Atsuko Sakata, Koichi Watanabe | 2002-07-23 |
| 6342131 | Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field | Viraj Y. Sardesai, Christopher Parks, John Benedict | 2002-01-29 |
| 6313535 | Wiring layer of a semiconductor integrated circuit | Junichiro Iba, Masaki Narita | 2001-11-06 |
| 6307267 | Semiconductor device and manufacturing method thereof | Junichi Wada, Yasushi Oikawa | 2001-10-23 |
| 6140236 | High throughput A1-Cu thin film sputtering process on small contact via for manufacturable beol wiring | Darryl D. Restaino, Chi-Hua Yang, Hans W. Poetzlberger, Hideaki Aochi | 2000-10-31 |
| 6071810 | Method of filling contact holes and wiring grooves of a semiconductor device | Junichi Wada, Atsuko Sakata, Takamasa Usui, Masahiko Hasunuma, Hideki Shibata +3 more | 2000-06-06 |
| 6048791 | Semiconductor device with electrode formed of conductive layer consisting of polysilicon layer and metal-silicide layer and its manufacturing method | Katsuya Okumura | 2000-04-11 |