Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852985 | Imprint method, imprint apparatus, and film formation apparatus | Takeshi Higuchi, Takahiro Iwasaki | 2023-12-26 |
| 11762285 | Template, patterning method, and method for manufacturing semiconductor device | Masaki Mitsuyasu, Kazuya Fukuhara, Kazuhiro Takahata, Sachiko Kobayashi | 2023-09-19 |
| 11669011 | Template, template manufacturing method, and semiconductor device manufacturing method | Jun Watanabe, Kazuya Fukuhara | 2023-06-06 |
| 11192282 | Template, template manufacturing method, and semiconductor device manufacturing method | Kei Kobayashi, Seiji Morita, Hirokazu Kato | 2021-12-07 |
| 10796948 | Pattern forming method and imprint apparatus | Tetsuro Nakasugi, Kazuhiro Takahata | 2020-10-06 |
| 10725374 | Template substrate, method of manufacturing template substrate, and method of manufacturing semiconductor device | — | 2020-07-28 |
| 10274822 | Template and method of manufacturing semiconductor device | Motofumi Komori, Kazuhiro Takahata | 2019-04-30 |
| 9242407 | Resin for thermal imprinting | Toshifumi Takemori, Yoshiaki Takaya, Takahito Mita, Tetsuya Iizuka, Yuji Hashima +3 more | 2016-01-26 |
| 8721950 | Resin for thermal imprint | Takemori Toshifumi, Yoshiaki Takaya, Takahito Mita, Tetsuya Iizuka, Yuji Hashima +3 more | 2014-05-13 |
| 8597769 | Etching mask, base material having etching mask, finely processed article, and method for production of finely processed article | Yoshiaki Takaya, Takuro Satsuka, Yoshihisa Hayashida, Takahisa Kusuura | 2013-12-03 |
| 8324332 | Resin for thermal imprint | Takemori Toshifumi, Yoshiaki Takaya, Takahito Mita, Tetsuya Iizuka, Yuji Hashima +3 more | 2012-12-04 |