Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071157 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2011-12-06 |
| 7669608 | Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle | Kei Hayasaki, Shinichi Ito, Riichiro Takahashi | 2010-03-02 |
| 7604832 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2009-10-20 |
| 7364839 | Method for forming a pattern and substrate-processing apparatus | Kei Hayasaki, Shinichi Ito, Tomoyuki Takeishi, Kenji Kawano | 2008-04-29 |
| 7312018 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2007-12-25 |
| 7067033 | Chemical liquid processing apparatus for processing a substrate | Shinichi Ito, Riichiro Takahashi, Katsuya Okamura | 2006-06-27 |
| 7018481 | Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle | Kei Hayasaki, Shinichi Ito, Riichiro Takahashi | 2006-03-28 |
| 6842281 | Observation device, ultraviolet microscope and observation method | Atsushi Tsurumune, Jiro Mizuno, Shinichi Ito, Riichiro Takahashi | 2005-01-11 |
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2004-10-05 |
| 6719844 | Deposition method, deposition apparatus, and pressure-reduction drying apparatus | Shinichi Ito | 2004-04-13 |
| 6709531 | Chemical liquid processing apparatus for processing a substrate and the method thereof | Shinichi Ito, Riichiro Takahashi, Katsuya Okamura | 2004-03-23 |
| 6709699 | Film-forming method, film-forming apparatus and liquid film drying apparatus | Shinichi Ito, Katsuya Okumura | 2004-03-23 |
| 6506453 | Deposition method, deposition apparatus, and pressure-reduction drying apparatus | Shinichi Ito | 2003-01-14 |
| 6372413 | Method for cleaning the surface of substrate to which residues of resist stick | Shinichi Ito | 2002-04-16 |