Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11908659 | Multi charged particle beam writing apparatus | Toshiki Kimura, Hirofumi Morita, Takanao Touya | 2024-02-20 |
| 11574797 | Multiple-charged particle-beam irradiation apparatus and multiple-charged particle-beam irradiation method | — | 2023-02-07 |
| 11217428 | Multi charged particle beam writing apparatus | Hirofumi Morita | 2022-01-04 |
| 11205557 | Multi charged particle beam writing apparatus | Kazuhiro Kishi | 2021-12-21 |
| 10236158 | Heat transfer plate and writing apparatus | Kenichi Kataoka, Yoshiro Yamanaka | 2019-03-19 |