Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11835867 | Measuring device and measuring method | — | 2023-12-05 |
| 11215931 | Semiconductor device manufacturing system, and semiconductor device manufacturing method | — | 2022-01-04 |
| 10816908 | Light-exposure method and light-exposure apparatus | — | 2020-10-27 |
| 10120275 | Layout method of mask pattern, manufacturing method of a semiconductor device and exposure mask | Yoshihiro Yanai, Michiya Takimoto, Naoki Sato, Satoshi Usui, Takaki Hashimoto | 2018-11-06 |