Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152329 | Method of separating bonded substrate, method of manufacturing semiconductor storage device, and substrate separation apparatus | — | 2021-10-19 |
| 10153176 | Manufacturing method of semiconductor device and template for nanoimprint | — | 2018-12-11 |
| 9941137 | Substrate planarizing method and dropping amount calculating method | Kazuhiro Takahata | 2018-04-10 |
| 9391086 | Nonvolatile semiconductor memory device and method of manufacturing nonvolatile semiconductor memory device | Kazunori Horiguchi | 2016-07-12 |
| 8586478 | Method of making a semiconductor device | Yunpeng Yin, Sivananda K. Kanakasabapathy | 2013-11-19 |
| 8124322 | Method for manufacturing semiconductor device, and method for processing etching-target film | — | 2012-02-28 |
| 7799693 | Method for manufacturing a semiconductor device | — | 2010-09-21 |
| 7754543 | Method of patterning multiple-layered resist film and method of manufacturing semiconductor device | — | 2010-07-13 |
| 7541281 | Method for manufacturing electronic device | Hitoshi Ishimori | 2009-06-02 |
| 7488691 | Method of fabricating semiconductor device | — | 2009-02-10 |
| 7439171 | Method for manufacturing electronic device | Sachiko Yabe | 2008-10-21 |
| 7229915 | Method for manufacturing semiconductor device | — | 2007-06-12 |
| 6391772 | Method for forming interconnects in semiconductor device | Ken Tokashiki | 2002-05-21 |
| 6103631 | Method of manufacturing semiconductor device | Kazuyoshi Yoshida | 2000-08-15 |