Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8076220 | Fabrication method for device structure having transparent dielectric substrate | Toshiyuki Nakamura, Satoshi Machida, Takashi Taguchi | 2011-12-13 |
| 7745880 | Dielectric substrate with reflecting films | Toshiyuki Nakamura, Satoshi Machida, Takashi Taguchi | 2010-06-29 |
| 7439171 | Method for manufacturing electronic device | Eiichi Soda | 2008-10-21 |
| 7388651 | Focus monitoring method | — | 2008-06-17 |
| 7332405 | Method of forming alignment marks for semiconductor device fabrication | Takashi Taguchi, Minoru Watanabe | 2008-02-19 |
| 6809002 | Method of manufacturing an alignment mark | Takashi Taguchi | 2004-10-26 |
| 6572285 | Photoresist developing nozzle, photoresist developing apparatus, and photoresist developing method | — | 2003-06-03 |
| 6349594 | Method of measuring film thickness distribution | — | 2002-02-26 |