Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153174 | Method of manufacturing semiconductor device | — | 2018-12-11 |
| 8871408 | Mask pattern creation method, recording medium, and semiconductor device manufacturing method | Yoko Takekawa, Masafumi Asano, Yingkang Zhang, Kazuhiro Takahata | 2014-10-28 |
| 8476170 | Method of forming pattern, method of manufacturing semiconductor device, and method of manufacturing template | — | 2013-07-02 |