Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176236 | Semiconductor manufacturing apparatus and method for manufacturing semiconductor device | Wu LI, Yuto ITAGAKI, Minki CHOU | 2024-12-24 |
| 11651969 | Etching method, semiconductor manufacturing apparatus, and method of manufacturing semiconductor device | Chihiro Abe, Toshiyuki Sasaki, Hisataka Hayashi, Mitsuhiro Omura | 2023-05-16 |
| 11024510 | Pattern forming method and method of manufacturing semiconductor device | — | 2021-06-01 |
| 10727278 | Method of manufacturing semiconductor device and semiconductor manufacturing apparatus | — | 2020-07-28 |
| 10490415 | Method of manufacturing 3-dimensional memories including high aspect ratio memory hole patterns | Atsushi Takahashi, Toshiyuki Sasaki | 2019-11-26 |
| 10381198 | Plasma processing apparatus and plasma processing method | Akio Ui, Hisataka Hayashi, Kazuhiro Tomioka, Hiroshi Yamamoto | 2019-08-13 |
| 10026622 | Method for manufacturing semiconductor device | Mitsuhiro Omura, Itsuko Sakai | 2018-07-17 |
| 9871054 | Semiconductor device and method for manufacturing same | Atsushi Takahashi, Toshiyuki Sasaki | 2018-01-16 |
| 9502470 | Semiconductor memory device and method for manufacturing same | Atsushi Takahashi, Toshiyuki Sasaki | 2016-11-22 |
| 9384980 | Manufacturing method of semiconductor device | Yasuhito Yoshimizu, Mitsuhiro Omura, Hisashi Okuchi, Satoshi Wakatsuki | 2016-07-05 |
| 9373523 | Semiconductor device manufacturing method | Keisuke Kikutani | 2016-06-21 |
| 9111875 | Pattern formation method | Hiroshi Yamamoto, Hisataka Hayashi, Mitsuhiro Omura | 2015-08-18 |
| 9105584 | Method of manufacturing a semiconductor device | Mitsuhiro Omura, Toshiyuki Sasaki, Kazuhisa Matsuda | 2015-08-11 |
| 8536061 | Semiconductor device manufacturing method | Hisataka Hayashi, Yusuke Kasahara | 2013-09-17 |
| 7902076 | Method of fabricating semiconductor device | — | 2011-03-08 |