Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11437224 | Plasma processing apparatus | — | 2022-09-06 |
| 11387082 | Plasma processing apparatus | — | 2022-07-12 |
| 11387083 | Plasma processing apparatus | — | 2022-07-12 |
| 10111313 | Plasma processing apparatus and plasma processing method | Takeharu MOTOKAWA, Tokuhisa Ooiwa, Kensuke Demura, Tomoaki Yoshimori, Makoto Karyu +1 more | 2018-10-23 |
| 8834674 | Plasma etching apparatus | Takeharu MOTOKAWA | 2014-09-16 |
| 8434993 | Robot apparatus and processing apparatus provided therewith, ashing system, and ashing method | Masahiro Tanabe | 2013-05-07 |
| 6045315 | Robot apparatus and treating apparatus | Atsushi Kinase, Kimio Kogure, Hisataka Komatsu | 2000-04-04 |