Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5622888 | Method of manufacturing a semiconductor device | Satoshi Kamiyama | 1997-04-22 |
| 5591486 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Sadahisa Noguchi | 1997-01-07 |
| 5491339 | Charged particle detection device and charged particle radiation apparatus | Tadashi Mitsui, Nozomu Harada, Motosuke Miyoshi, Katsuya Okumura, Haruo Okano | 1996-02-13 |
| 5444207 | Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field | Keiji Horioka, Haruo Okano, Katsuya Okumura, Isahiro Hasegawa, Masaki Narita | 1995-08-22 |
| 5385763 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Sadahisa Noguchi | 1995-01-31 |
| 5221450 | Electrostatic chucking method | Kei Hattori | 1993-06-22 |
| 5156881 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Sadahisa Noguchi | 1992-10-20 |
| 5112645 | Phototreating method and apparatus therefor | Haruo Okano, Yasuhiro Horiike | 1992-05-12 |
| 4954406 | Electrophotographic plate including an undercoating layer having a smooth surface | Keiichi Endo, Yasushi Shinbo, Akira Kageyama, Yasuo Katsuya, Chihiro Kato +1 more | 1990-09-04 |
| 4878995 | Method of dry etching and apparatus for use in such method | Tsunetoshi Arikado, Haruo Okano, Yasuhiro Horiike | 1989-11-07 |
| 4844774 | Phototreating method and apparatus therefor | Haruo Okano, Yasuhiro Horiike | 1989-07-04 |
| 4838978 | Dry etching apparatus | Haruo Okano, Tsunetoshi Arikado, Yasuhiro Horiike | 1989-06-13 |
| 4786361 | Dry etching process | Haruo Okano, Yasuhiro Horiike | 1988-11-22 |
| 4668337 | Dry-etching method and apparatus therefor | Haruo Okano, Yasuhiro Horiike | 1987-05-26 |
| 4642171 | Phototreating apparatus | Haruo Okano, Yasuhiro Horiike | 1987-02-10 |
| 4595601 | Method of selectively forming an insulation layer | Keiji Horioka, Haruo Okano | 1986-06-17 |
| 4529475 | Dry etching apparatus and method using reactive gases | Haruo Okano, Yasuhiro Horiike | 1985-07-16 |