Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9153419 | Pattern defect inspection using data based on secondary electron from pattern | — | 2015-10-06 |
| 8532395 | Pattern inspection method and semiconductor device manufacturing method | — | 2013-09-10 |
| 8355560 | Pattern evaluation system, pattern evaluation method and semiconductor device manufacturing method | — | 2013-01-15 |
| 8290242 | Defect inspection apparatus and defect inspection method | — | 2012-10-16 |
| 8160349 | Pattern shape evaluation method, program, and semiconductor device manufacturing method | — | 2012-04-17 |
| 8150177 | Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program | — | 2012-04-03 |
| 8144338 | Pattern measurement apparatus and pattern measurement method | — | 2012-03-27 |
| 8144969 | Pattern evaluation method, computer-readable recording medium, and manufacturing method of semiconductor device | — | 2012-03-27 |
| 8126257 | Alignment of semiconductor wafer patterns by corresponding edge groups | Yumiko Miyano | 2012-02-28 |
| 8090192 | Pattern misalignment measurement method, program, and semiconductor device manufacturing method | — | 2012-01-03 |
| 8086041 | Pattern evaluation method, pattern matching method and computer readable medium | — | 2011-12-27 |
| 8045807 | Pattern edge detecting method and pattern evaluating method | — | 2011-10-25 |
| 8041105 | Pattern evaluation method, computer-readable medium, and semiconductor device manufacturing method | — | 2011-10-18 |
| 8036445 | Pattern matching method, program and semiconductor device manufacturing method | Atsushi Onishi, Yuichiro Yamazaki | 2011-10-11 |
| 8019149 | Pattern shape evaluation method and pattern shape evaluation apparatus utilizing the same | Hideaki Abe | 2011-09-13 |
| 8019165 | Image processing apparatus, image processing method, defect detection method, semiconductor device manufacturing method, and program | — | 2011-09-13 |
| 7879309 | Method for preparing functional nanomaterials utilizing endothermic reaction | Takashi Sekiguchi, Mika Gamo, Yafei Zhang, Toshihiro Ando | 2011-02-01 |
| 7787687 | Pattern shape evaluation apparatus, pattern shape evaluation method, method of manufacturing semiconductor device, and program | Yumiko Miyano | 2010-08-31 |
| 7771697 | Method for preparing functional nanomaterials utilizing endothermic reaction | Takashi Sekiguchi, Mika Gamo, Yafei Zhang, Toshihiro Ando | 2010-08-10 |
| 7754114 | Methods for manufacturing optical fiber probe and for processing micromaterial | Hidetoshi Oikawa | 2010-07-13 |
| 7702157 | Pattern evaluation method, pattern matching method and computer readable medium | — | 2010-04-20 |
| 7668373 | Pattern evaluation method, method of manufacturing semiconductor, program and pattern evaluation apparatus | — | 2010-02-23 |
| 7526408 | Measurement system and method and computer program for processing measurement data | — | 2009-04-28 |
| 7341681 | Method of manufacturing optical fiber probe and for finishing micro material | Hidetoshi Oikawa | 2008-03-11 |
| 7274820 | Pattern evaluation system, pattern evaluation method and program | — | 2007-09-25 |