Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5776557 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Makoto Sekine | 1998-07-07 |
| 5591486 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Makoto Sekine | 1997-01-07 |
| 5458919 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano | 1995-10-17 |
| 5385763 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Makoto Sekine | 1995-01-31 |
| 5156881 | Method for forming a film on a substrate by activating a reactive gas | Haruo Okano, Makoto Sekine | 1992-10-20 |