Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12264998 | Vibration control system | Yoshikado Yamauchi, Yuji Nakaura | 2025-04-01 |
| 11879816 | Vibration control system | Yoshikado Yamauchi, Yuji Nakaura | 2024-01-23 |
| 8784931 | ULSI wiring and method of manufacturing the same | Tetsuya Osaka, Nao Takano | 2014-07-22 |
| 8069728 | Apparatus for optimizing system performance and related control methods | John A. Goodfellow, Milan Prodanovic, Koshi YAMAMOTO, Norihiro Maeda | 2011-12-06 |
| 7821135 | Semiconductor device with improved stress migration resistance and manufacturing process therefor | — | 2010-10-26 |
| 7741214 | Method of forming a semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thicknesses formed thereon | Toshiyuki Takewaki | 2010-06-22 |
| 7566973 | Semiconductor device and method of manufacturing the same | — | 2009-07-28 |
| 7563696 | Semiconductor device manufacturing apparatus and semiconductor device manufacturing method | — | 2009-07-21 |
| 7485566 | Method of manufacturing semiconductor device | Naoyoshi Kawahara | 2009-02-03 |
| 7479700 | Semiconductor device featuring copper wiring layers of different widths having metal capping layers of different thickness formed thereon, and method for manufacturing the same | Toshiyuki Takewaki | 2009-01-20 |
| 7332813 | Semiconductor device | — | 2008-02-19 |
| 7259095 | Semiconductor device and manufacturing process therefor as well as plating solution | — | 2007-08-21 |
| 7220318 | Semiconductor device manufacturing apparatus and semiconductor device manufacturing method | — | 2007-05-22 |
| 7138700 | Semiconductor device with guard ring for preventing water from entering circuit region from outside | Ryuji Tomita, Tetsuya Kurokawa, Takashi Ishigami, Manabu Iguchi, Makoto Sekine | 2006-11-21 |
| 6765294 | Semiconductor device including dual-damascene structure and method for manufacturing the same | — | 2004-07-20 |
| 6680247 | Manufacturing method of a semiconductor device | — | 2004-01-20 |
| 6670639 | Copper interconnection | Hidekazu Okabayashi, Akiko Fujii, Shuichi Saito | 2003-12-30 |
| 6670270 | Semiconductor device manufacturing apparatus and semiconductor device manufacturing method | — | 2003-12-30 |
| 6486559 | COPPER WIRING STRUCTURE COMPRISING A COPPER MATERIAL BURIED IN A HOLLOW OF AN INSULATING FILM AND A CARBON LAYER BETWEEN THE HOLLOW AND THE COPPER MATERIAL IN SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME | — | 2002-11-26 |
| 6482741 | COPPER WIRING STRUCTURE COMPRISING A COPPER MATERIAL BURIED IN A HOLLOW OF AN INSULATING FILM AND A CARBON LAYER BETWEEN THE HOLLOW AND THE COPPER MATERIAL IN SEMICONDUCTOR DEVICE AND METHOD FABRICATING THE SAME | — | 2002-11-19 |
| 6478935 | Semiconductor device plating apparatus | — | 2002-11-12 |
| 6472318 | Method of fabricating semiconductor device having trench interconnection | — | 2002-10-29 |
| 6391168 | Plating apparatus utilizing an auxiliary electrode | — | 2002-05-21 |
| 6377900 | Measuring system for transfer function matrix of a system to be controlled in multi-degree of freedom vibration control | Yoshikado Yamauchi | 2002-04-23 |
| 6268090 | Process for manufacturing semiconductor device and exposure mask | Yoshihisa Matsubara, Kazumi Sugai, Nobukazu Ito | 2001-07-31 |