Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6569756 | Method for manufacturing a semiconductor device | — | 2003-05-27 |
| 6509649 | Semiconductor device and fabricating method thereof | — | 2003-01-21 |
| 6496255 | Measurement of crystal face orientation | Belgacem Haba, Yukio Morishige | 2002-12-17 |
| 6465354 | Method of improving the planarization of wiring by CMP | Nobukazu Ito, Hiroaki Tachibana | 2002-10-15 |
| 6403468 | Method for forming embedded metal wiring | — | 2002-06-11 |
| 6368981 | Method of manufacturing semiconductor device and chemical mechanical polishing apparatus | Yasuaki Tsuchiya | 2002-04-09 |
| 6268090 | Process for manufacturing semiconductor device and exposure mask | Yoshihisa Matsubara, Nobukazu Ito, Kazuyoshi Ueno | 2001-07-31 |
| 6184131 | Process of forming solid thin film from layer of liquid material without void and film forming apparatus used therein | — | 2001-02-06 |
| 6174563 | Method for forming thin metal films | — | 2001-01-16 |
| 6143671 | Semiconductor device manufacturing method | — | 2000-11-07 |
| 6123992 | Method of forming aluminum interconnection layer | — | 2000-09-26 |
| 6114236 | Process for production of semiconductor device having an insulating film of low dielectric constant | — | 2000-09-05 |
| 6083832 | Method of manufacturing semiconductor device | — | 2000-07-04 |
| 5993546 | Apparatus for forming a solid thin film from a layer of liquid material without void | — | 1999-11-30 |
| 5793479 | Thin-film formation device and method | Shunji Kishida, Akiko Kobayashi | 1998-08-11 |
| 5545591 | Method for forming an aluminum film used as an interconnect in a semiconductor device | Hidekazu Okabayashi, Shunji Kishida | 1996-08-13 |