Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5793479 | Thin-film formation device and method | Kazumi Sugai, Akiko Kobayashi | 1998-08-11 |
| 5545591 | Method for forming an aluminum film used as an interconnect in a semiconductor device | Kazumi Sugai, Hidekazu Okabayashi | 1996-08-13 |
| 5393577 | Method for forming a patterned layer by selective chemical vapor deposition | Fumihiko Uesugi | 1995-02-28 |
| 4976930 | Method and apparatus for inducing photochemical reaction | Hiroyuki Yokoyama, Yukio Morishige, Kunihiko Washio | 1990-12-11 |